A method of depositing thin semiconductor films used to make certain types of photovoltaic devices.

With this method, a substrate is exposed to one or more vaporized compounds, one or more of which contain desirable constituents.

A chemical reaction is initiated, at or near the substrate surface, to produce the desired material that will condense on the substrate.

A process of producing materials for semiconductors, including photovoltaic material, in which a surface layer is produced by the deposition on a substrate of a volatile organo-metallic compound; such as, methyl, which is transported to the surface through the gas phase at elevated temperatures.